Wet Process Applications

Wet process tool & wet bench designers are challenged by selecting the optimal material for the right environment the material must perform.  Whether it is for wafer handling or chamber and structural applications, materials are chosen based on properties such as:

  • Chemical resistance & pH of the contact solution
  • Purity & leaching
  • Machinability & dimensional stability
  • FM 4910 (Factory Mutual Flame Retardant rating)
  • Weld retention

Typical Applications

  • Wet Process tools chamber walls
  • Wet Bench structural components & tanks
  • Wafer combs, shower heads, wafer chucks
  • Machined chamber reservoirs & housings

Common product families used for Wet Process applications

  • PEEK
  • PPS
  • PET
  • PP
  • PTFE
  • PVDF
  • ECTFE

Feature Materials

  • Semitron® PP – the worlds first polypropylene developed specifically for the Semiconductor market!  Available from 0.25” thick up to 5” thick, this polypropylene offers customers a low stress, more consistent center line for those challenging applications!

Data Sheets and Specifications