Wet Process Applications
Wet process tool & wet bench designers are challenged by selecting the optimal material for the right environment the material must perform. Whether it is for wafer handling or chamber and structural applications, materials are chosen based on properties such as:
- Chemical resistance & pH of the contact solution
- Purity & leaching
- Machinability & dimensional stability
- FM 4910 (Factory Mutual Flame Retardant rating)
- Weld retention
Typical Applications
- Wet Process tools chamber walls
- Wet Bench structural components & tanks
- Wafer combs, shower heads, wafer chucks
- Machined chamber reservoirs & housings
Common product families used for Wet Process applications
- PEEK
- PPS
- PET
- PP
- PTFE
- PVDF
- ECTFE
Featured Material
-
Semitron® PP – the worlds first polypropylene developed specifically for the Semiconductor market! Available from 0.25” thick up to 5” thick, this polypropylene offers customers a low stress, more consistent center line for those challenging applications!
Common Material Data and Descriptions
- Ketron® 1000 PEEK
- TECAPEEK® natural
- Semitron PP
- TECAFORM AH LM white
- TECATRON PPS natural
- TECAPET white
- Techtron® PPS
- TECAFLON PVDF natural
- KYNAR 740 PVDF natural
- Ertalyte PET-P
- Kytec PVDF
- Boltaron® 4325
- Flametec® CP5
- Flametec® Kytec® Cleanroom PVC-C
- Flametec® Kytec® CP-7D
- Flametec® Kytec® PVDF
- Flametec® Kytec® Thermax XL
