PPS vs PEEK for Wet Process Tools: When to Switch for Cost

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When Can PPS Replace PEEK for Cost in Wet Process Tools?

In select semiconductor wet process applications, semiconductor-grade PPS can deliver comparable chemical resistance and dimensional stability at a lower material cost than PEEK—provided the application does not require PEEK’s higher thermal performance.

Context: Wet Process Component Requirements

Wet process components typically require:

  • High chemical resistance
  • Dimensional stability
  • Low outgassing
  • Mechanical strength and stiffness
  • Thermal performance appropriate to the tool environment

PEEK is an outstanding performer overall, especially for elevated temperature service—but that performance comes with a higher material cost. Where peak thermal demands are not required, semiconductor-grade PPS may provide a more economical choice while meeting the application’s chemical and mechanical needs.

Quick Answer

PPS can often replace PEEK in wet process components that:

  • Operate below the higher heat deflection range typically achieved by PEEK
  • Prioritize chemical resistance, dimensional stability, and low outgassing
  • Require cost optimization without sacrificing critical performance

PPS vs. PEEK — At-a-Glance Comparisons

Mechanical Properties (typical)
Critical Property Semiconductor-Grade PPS Industry-Standard PEEK
Tensile Modulus (psi) ~500,000 ~630,000
Flexural Modulus (psi) ~575,000 ~600,000
Coefficient of Linear Thermal Expansion (CLTE) ~2.8 ~2.6
Moisture Absorption @ 24 hrs Low Low
Heat Deflection Temp @ 264 psi (°F) ~250 ~320
Relative Cost $ $$

Outgassing Properties (typical)

Material %TML %CVCM %WVR
PEEK 0.26 0 0.12
Semicon-grade PPS 0.04 0 0

Chemical Resistance (representative)

  • Acids/Bases: Both materials show strong resistance across many wet process chemistries; verify by specific concentration and temperature.
  • Solvents: PEEK generally performs well against many organics; PPS also offers broad resistance in semiconductor environments.
  • Halogens/Salts/Alcohols/Amines: Application-specific validation still required.

Note: Always confirm against your exact chemistry, concentration, and operating temperature/time profile.

Selection Guidance

  1. Thermal load first: If your process demands higher heat deflection temperatures, PEEK may be required.
  2. If temperatures are moderate: Evaluate PPS for cost savings while maintaining chemical resistance, dimensional stability, and low outgassing.
  3. Validate in service: Confirm with real bath chemistry, exposure time, and mechanical loading.

Talk with Port Plastics

Choosing materials for wet process tool components benefits from a partner who understands both plastics and the semiconductor market. Contact your local Port Plastics sales office with your application details for material selection support.

Explore semiconductor wet process applications ➜

FAQ: PPS vs. PEEK

When is PPS a good substitute for PEEK?
When operating temperatures are moderate and the application prioritizes chemical resistance, dimensional stability, low outgassing, and lower cost.
What performance do I give up moving from PEEK to PPS?
Mainly higher heat-deflection capability; verify mechanical margins and long-term thermal aging for your duty cycle.
Is outgassing acceptable for semiconductor tools?
Semiconductor-grade PPS and PEEK both exhibit low outgassing; review %TML/%CVCM/%WVR data for your cleanliness spec.

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PPS vs PEEK for Wet Process Tools: When to Switch for Cost

Source: Port Plastics technical brief “When can PPS replace PEEK for cost?”

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