Back End Test

Addresses the challenges presented by miniaturization

Dry Environment & ESd

Materials for specialty applications ranging from wafer mobility & electronic fixturing to metrology and lithography applications

CMP

Materials for 150MM, 200MM, and 300MM CMP retainer ring applications

Wet Process

Materials for Clean, PVD, Wet Etch, ECD & various Wet Bench & Wet Process tool applications

Vacuum Chamber

Vacuum Chamber

Materials and plasma resistance materials for Etch, Vapor Deposition & Ion Implant applications