The Essence of Purity: Understanding the SEMI F57 Standard

Published by: Port Plastics | www.portplastics.com

Ultrapure Water (UPW) has become an essential component in the production of integrated circuit (IC) chips on silicon wafers. As IC node sizes continue to shrink, the precision and cleanliness required in fabrication processes have intensified. Every layer of an IC chip is built with specialized steps requiring tools, materials, and environments that meet the highest purity standards. That’s where SEMI F57 comes into play.

Why UPW Matters in Semiconductor Fabrication

During wafer processing—particularly Front-End-of-Line (FEOL) steps—ultrapure water is used extensively for cleaning. Processes like wet etching and chemical-mechanical polishing (CMP) generate particles that must be completely removed to ensure optimal chip yield. In fact, a medium-volume semiconductor fab can consume as much UPW as a community of 20,000 people.

What is SEMI F57?

SEMI F57 is the industry-standard guideline for ultra-high purity (UHP) polymer components used in the distribution of ultrapure water and liquid chemicals in semiconductor fabs. These standards ensure that plastic materials used—such as PFA tubing, manifolds, valves, and couplings—do not contaminate the UPW or compromise yield.

SEMI F57 Testing Requirements

To qualify, materials must undergo rigorous testing, including a 7-day extraction process in 85°C ultrapure water, according to SEMI F40 preparation guidelines. SEMI F57 evaluates components on three main criteria:

• Trace Metallic Contribution: Limits for 22 metals
• Ionic Contamination: Limits for 8 ions
• Total Organic Carbon (TOC): Overall contribution levels

Contaminants are measured in micrograms per square meter (µg/m²), often in single digits. To put it in perspective, 1 µg is equivalent to just 0.001 ml of pure water—highlighting just how clean these materials must be.

Why It Matters

As semiconductor technologies continue to evolve, there is zero room for contamination. Even microscopic extractables from polymer components can impact performance, reduce yield, or cause defects. Ensuring SEMI F57 compliance isn't just a best practice—it's a necessity.

Get Expert Guidance

Need support selecting SEMI F57-compliant plastic materials? Contact the experts at your local Port Plastics sales office to find the right materials for your cleanroom or UPW system.