Semitron® CMP XL20

Mitsubishi Chemical Advanced Materials
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Data Sheet

Semitron® CMP XL20 is the premium CMP material that was developed to give new tool designers and forward-thinking end users an opportunity to increase the number of devices successfully produced per wafer while decreasing the cost of consumables per device.  This is achieved by increasing the service life of the retaining ring. It is charcoal/black in color and opaque.

Advantages of Semitron® CMP XL20:

  • Significantly lower cost per wafer
  • Outperforms PPS up to 20x in most processes
  • High strength and stiffness promote fewer edge defects and better uniformity