Semitron® MPR1000 is a new engineering material developed for Semiconductor applications and more specifically for use in vacuum chamber applications such as these found in Etch, CVD and Ion Implant.
Advantages of Semitron® MPR-1000:
- Excellent heat resistance
- Low ionic content & low out-gassing
- Low rate of erosion in plasma chambers
- Excellent chip resistance, durability, and machinability
- Lowest cost plastic solution that also provides the highest level of performance in the chamber
Applications:
- Used in plasma-based chambers
- Clamp rings, trench rings, screw pins, and shower heads
- Centering pins, focus rings, insulators, vacuum pads, and wafer guides
