Semitron® MPR-1000 – Ceramic filled PAI

Mitsubishi Chemical Advanced Materials
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Semitron® MPR1000 is a new engineering material developed for Semiconductor applications and more specifically for use in vacuum chamber applications such as these found in Etch, CVD and Ion Implant.

Advantages of Semitron® MPR-1000:

  • Excellent heat resistance
  • Low ionic content & low out-gassing
  • Low rate of erosion in plasma chambers
  • Excellent chip resistance, durability, and machinability
  • Lowest cost plastic solution that also provides the highest level of performance in the chamber


  • Used in plasma-based chambers
  • Clamp rings, trench rings, screw pins, and shower heads
  • Centering pins, focus rings, insulators, vacuum pads, and wafer guides